Product Description
Product Description
Dry screw vacuum pump, is the use of a pair of screw, made in the pump shell synchronous high-speed reverse rotation of the effects of the suction and exhaust and suction device, 2 screw fine dynamic balancing correction, and is supported by bearings, is installed in the pump shell, between screw and screw has a certain gap, so the pump work, no friction between each other, smooth running, low noise, Working chamber without lubricating oil, therefore, dry screw pump can remove a lot of steam and a small amount of dust gas occasions, higher limit vacuum, lower power consumption, energy saving, maintenance-free and other advantages.
Our Advantages
There is no medium in the working chamber, which can obtain a clean vacuum.
. No clearance between rotating parts, high speed operation, small overall volume.
There is no compression in the gas, suitable for extraction of coagulable gas.
Can remove a lot of steam and a small amount of dust gas occasions.
. High vacuum, the ultimate vacuum up to 1 Pa.
Screw material is high strength special material, material density, wear resistance, stable performance.
No friction rotating parts, low noise.
. Simple structure, convenient maintenance.
Wider range of use: corrosive environment can be used.
No oil consumption, no water.
Pump gas directly discharged from the pump body, no pollution of water, no environmental pressure, more convenient gas recovery.
It can be composed of oil-free unit with Roots pump and molecular pump.
Typical Use
——Oil and gas recovery. ——Biological medicine ——Food Processing —— Single crystal furnace
——Vacuum forming ——Vacuum flame refining ——Electronic photovoltaic. ——Semiconductor synthesis
Product Parameters
| Type | Basic parameters | ||||||||
| Pumping speed (m3/h) |
Presure limit(Pa) | Power (kW) | revolution (rpm) | Inlet caliber (mm) |
outlet caliber (mm) | Pump head weight (kg) |
noise dB(A) | Overall dimension (length*width*height) (mm) |
|
| LG-10 | 10 | ≤5 | 0.75 | 2730 | KF16 | KF16 | 2 | ≤ 72 | 655x260x285 |
| LG-20 | 20 | ≤5 | 1.1 | 2840 | KF25 | KF25 | 5.5 | ≤72 | 720x305x370 |
| LG-50 | 50 | ≤10 | 2.2 | 2850 | KF40 | KF40 | 4 | ≤75 | 920x350x420 |
| LG-70 | 70 | ≤30 | 3 | 2850 | KF40 | KF40 | 8 | ≤75 | 910x390x460 |
| LG-90 | 90 | ≤30 | 4 | 2870 | KF50 | KF50 | 10 | ≤80 | 1000x410x495 |
Characteristic Curve
Detailed Photos
General Manager Speech
Deeply cultivate the vacuum technology, and research,develop and manufacture the vacuum equipment to provide the best solution in the vacuum field and make the vacuum application easier.
Company Profile
ZheJiang Kaien Vacuum Technology Co., Ltd. is a high-tech enterprise integrating R & D, production and operation of vacuum equipment. The company has strong technical force, excellent equipment and considerate after-sales service. The product manufacturing process is managed in strict accordance with IS09001 quality system. It mainly produces and sells screw vacuum pump, roots pump, claw vacuum pump, runoff vacuum pump, scroll pump, water ring vacuum pump, vacuum unit and other vacuum systems.
New plant plHangZhou
The company’s products have been for a number of food, medicine, refrigeration, drying plants and a number of transformer related equipment manufacturers for vacuum equipment. The products are widely used in vacuum drying and dehydration, kerosene vapor phase drying, vacuum impregnation, vacuum metallurgy, vacuum coating, vacuum evaporation, vacuum concentration, oil and gas recovery, etc.
High precision machining equipment
The company cooperates with colleges and universities to research and develop core technologies, and owns dozens of independent intellectual property patents. Adhering to the basic tenet of quality, reputation and service, the company takes leading-edge technology of vacuum pump as its own responsibility, and wholeheartedly serves customers of vacuum equipment application in various industries with rigorous working attitude and professional working style.
Product quality wins consumer cooperation
ISO9001
| Warranty: | One Year |
|---|---|
| Oil or Not: | Oil Free |
| Structure: | Screw |
| Exhauster Method: | Entrapment Vacuum Pump |
| Vacuum Degree: | High Vacuum |
| Work Function: | Mainsuction Pump |
| Customization: |
Available
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What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?
Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:
Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.
Here are some key roles of vacuum pumps in semiconductor manufacturing:
1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.
2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.
3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.
4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.
5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.
6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.
7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.
8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.
Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.
Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.
How Do Vacuum Pumps Contribute to Energy Savings?
Vacuum pumps play a significant role in energy savings in various industries and applications. Here’s a detailed explanation:
Vacuum pumps contribute to energy savings through several mechanisms and efficiencies. Some of the key ways in which vacuum pumps help conserve energy are:
1. Improved Process Efficiency: Vacuum pumps are often used to remove gases and create low-pressure or vacuum conditions in industrial processes. By reducing the pressure, vacuum pumps enable the removal of unwanted gases or vapors, improving the efficiency of the process. For example, in distillation or evaporation processes, vacuum pumps help lower the boiling points of liquids, allowing them to evaporate or distill at lower temperatures. This results in energy savings as less heat is required to achieve the desired separation or concentration.
2. Reduced Energy Consumption: Vacuum pumps are designed to operate efficiently and consume less energy compared to other types of equipment that perform similar functions. Modern vacuum pump designs incorporate advanced technologies, such as variable speed drives, energy-efficient motors, and optimized control systems. These features allow vacuum pumps to adjust their operation based on demand, reducing energy consumption during periods of lower process requirements. By consuming less energy, vacuum pumps contribute to overall energy savings in industrial operations.
3. Leak Detection and Reduction: Vacuum pumps are often used in leak detection processes to identify and locate leaks in systems or equipment. By creating a vacuum or low-pressure environment, vacuum pumps can assess the integrity of a system and identify any sources of leakage. Detecting and repairing leaks promptly helps prevent energy wastage associated with the loss of pressurized fluids or gases. By addressing leaks, vacuum pumps assist in reducing energy losses and improving the overall energy efficiency of the system.
4. Energy Recovery Systems: In some applications, vacuum pumps can be integrated into energy recovery systems. For instance, in certain manufacturing processes, the exhaust gases from vacuum pumps may contain heat or have the potential for energy recovery. By utilizing heat exchangers or other heat recovery systems, the thermal energy from the exhaust gases can be captured and reused to preheat incoming fluids or provide heat to other parts of the process. This energy recovery approach further enhances the overall energy efficiency by utilizing waste heat that would otherwise be lost.
5. System Optimization and Control: Vacuum pumps are often integrated into centralized vacuum systems that serve multiple processes or equipment. These systems allow for better control, monitoring, and optimization of the vacuum generation and distribution. By centralizing the vacuum production and employing intelligent control strategies, energy consumption can be optimized based on the specific process requirements. This ensures that vacuum pumps operate at the most efficient levels, resulting in energy savings.
6. Maintenance and Service: Proper maintenance and regular servicing of vacuum pumps are essential for their optimal performance and energy efficiency. Routine maintenance includes tasks such as cleaning, lubrication, and inspection of pump components. Well-maintained pumps operate more efficiently, reducing energy consumption. Additionally, prompt repair of any faulty parts or addressing performance issues helps maintain the pump’s efficiency and prevents energy waste.
In summary, vacuum pumps contribute to energy savings through improved process efficiency, reduced energy consumption, leak detection and reduction, integration with energy recovery systems, system optimization and control, as well as proper maintenance and service. By utilizing vacuum pumps efficiently and effectively, industries can minimize energy waste, optimize energy usage, and achieve significant energy savings in various applications and processes.
How Are Vacuum Pumps Different from Air Compressors?
Vacuum pumps and air compressors are both mechanical devices used to manipulate air and gas, but they serve opposite purposes. Here’s a detailed explanation of their differences:
1. Function:
– Vacuum Pumps: Vacuum pumps are designed to remove or reduce the pressure within a closed system, creating a vacuum or low-pressure environment. They extract air or gas from a chamber, creating suction or negative pressure.
– Air Compressors: Air compressors, on the other hand, are used to increase the pressure of air or gas. They take in ambient air or gas and compress it, resulting in higher pressure and a compacted volume of air or gas.
2. Pressure Range:
– Vacuum Pumps: Vacuum pumps are capable of generating pressures below atmospheric pressure or absolute zero pressure. The pressure range typically extends into the negative range, expressed in units such as torr or pascal.
– Air Compressors: Air compressors, on the contrary, operate in the positive pressure range. They increase the pressure above atmospheric pressure, typically measured in units like pounds per square inch (psi) or bar.
3. Applications:
– Vacuum Pumps: Vacuum pumps have various applications where the creation of a vacuum or low-pressure environment is required. They are used in processes such as vacuum distillation, vacuum drying, vacuum packaging, and vacuum filtration. They are also essential in scientific research, semiconductor manufacturing, medical suction devices, and many other industries.
– Air Compressors: Air compressors find applications where compressed air or gas at high pressure is needed. They are used in pneumatic tools, manufacturing processes, air conditioning systems, power generation, and inflating tires. Compressed air is versatile and can be employed in numerous industrial and commercial applications.
4. Design and Mechanism:
– Vacuum Pumps: Vacuum pumps are designed to create a vacuum by removing air or gas from a closed system. They may use mechanisms such as positive displacement, entrapment, or momentum transfer to achieve the desired vacuum level. Examples of vacuum pump types include rotary vane pumps, diaphragm pumps, and diffusion pumps.
– Air Compressors: Air compressors are engineered to compress air or gas, increasing its pressure and decreasing its volume. They use mechanisms like reciprocating pistons, rotary screws, or centrifugal force to compress the air or gas. Common types of air compressors include reciprocating compressors, rotary screw compressors, and centrifugal compressors.
5. Direction of Air/Gas Flow:
– Vacuum Pumps: Vacuum pumps draw air or gas into the pump and then expel it from the system, creating a vacuum within the chamber or system being evacuated.
– Air Compressors: Air compressors take in ambient air or gas and compress it, increasing its pressure and storing it in a tank or delivering it directly to the desired application.
While vacuum pumps and air compressors have different functions and operate under distinct pressure ranges, they are both vital in various industries and applications. Vacuum pumps create and maintain a vacuum or low-pressure environment, while air compressors compress air or gas to higher pressures for different uses and processes.
editor by CX 2023-11-25