China Best Sales LG-10 Explosion-Proof High-Efficiency Screw Vacuum Pump with High Vacuum Degree vacuum pump for ac

Product Description

Product Description

1.Summary
The dry screw vacuum pump is a rotor that uses a pair of parallel screws to make synchronous, high-speed and reverse rotation in the pump housing. The rotor and the inner wall of the pump body form a number of sealing spaces. During the rotation, the continuous transmission of gas is formed to achieve the purpose of suction and exhaust.
The screw vacuum pump has a simple structure, but its processing technology requires higher requirements. It must ensure that the height between rotors is parallel, and that between rotors and between rotors and the inner wall of the pump body, there is a very small gap and no friction caused by contact, so as to ensure the realization of gas transmission and reduce gas backflow without the need for oil lubrication and sealing.

This requires that the entire product must be the highest standard from material selection to processing. Because the clearance between components is required to be very small, it is necessary to ensure that the screw and pump body materials are not easy to deform, especially when the temperature changes to a certain value, the locking phenomenon cannot occur due to deformation. Special material treatment shall be selected to ensure the fine processing of all parts. In addition to the fine processing of the 2 screws, dynamic balance correction shall be carried out. The shaft end bearing must be a high-quality special bearing, which not only ensures the parallelism of the screw rotor and is not prone to slight displacement, but also ensures smooth rotation and is not affected by temperature and other factors. When the vacuum pump is working, the clearance between them is small without friction, the operation is stable, the vibration is small, the noise is low, the energy is saved, and the service life is extended. The special screw structure can continuously promote the air flow without compression. The exhaust port is lower than the screw position, the liquid discharge capacity is strong, and it is easy to clean. The pump cavity has short channels, no partitions, and the exhaust and discharge are smooth, so the working efficiency is high, the suction is super strong, and the limit vacuum degree of the pump is greatly improved, It can provide high vacuum ≤ 5Pa or even close to 1Pa; There is no lubrication and pollution in the working chamber, which can provide a clean vacuum without worrying about backflow pollution. Extracts can also be directly recycled or discharged without environmental pressure. Elaborate design, simple structure and precise processing make it more convenient to use and easier to maintain, which is favored by many industry users. It is widely used, not only to extract condensable gas, but also to extract gas containing a large amount of water vapor and a small amount of dust. The specially treated overflow surface can also be used to extract certain corrosive gas, and it is also a special product for oil and gas recovery, solvent recovery, special gas recovery and other industries.
2.Advantages and disadvantages of dry screw vacuum pump
A.Advantage
    I. Clean and environment-friendly, the working chamber is free of lubricating oil, which is conducive to medium recovery, can obtain clean vacuum, no oil consumption, waste water discharge, and no pollution to the environment.
   II.The vacuum degree is high, the limit vacuum degree is ≤ 1Pa, and the pumping capacity in the high vacuum area is large.
  III.The anti-corrosion design is optional. The flow passage parts are made of titanium, stainless steel, nano ceramics, spraying NIP alloy and other materials and anti-corrosion coatings.
  IV.The condensable gas and a small amount of dust gas can be removed, and an automatic purging device is designed.
   v.Special shaft seal design prevents mutual pollution between pumped medium and lubricating oil.
  vi.Variable pitch screw pump saves energy and has low noise.
  vii.The operation is stable, the rotor is subject to fine dynamic balance test, and the operation vibration is small.
  viii.High configuration, sealed in Germany, Internationally renowned brand of bearing position, gear grade 5 grinding.
B.Shortcoming
i.Due to the difficulty in processing the screw pump, the screw pump used in China mainly depends on imports, and the price is very expensive.
ii.It is not suitable for pumping out explosive gas.
iii.It is not suitable for pumping gas with too high oxygen content.

LG-10 Screw pump has high efficiency, high vacuum and high cleanliness, and has attracted much attention from users. It is a small vacuum pump that cools down in the form of air cooling.

There is no medium in the working chamber, which can obtain a clean vacuum.
. No clearance between rotating parts, high speed operation, small overall volume.
There is no compression in the gas, suitable for extraction of coagulable gas.
Can remove a lot of steam and a small amount of dust gas occasions.
. High vacuum, the ultimate vacuum up to 1 Pa.
Screw material is high strength special material, material density, wear resistance, stable performance.
No friction rotating parts, low noise.
. Simple structure, convenient maintenance.
Wider range of use: corrosive environment can be used.
No oil consumption, no water.
Pump gas directly discharged from the pump body, no pollution of water, no environmental pressure, more convenient gas recovery.
It can be composed of oil-free unit with Roots pump and molecular pump.

 

Typical Use

Screw vacuum pump can be configured according to user requirements, or it can use explosion-proof motor with high configuration. Because of its low noise, no oil and no pollution, clean and high vacuum, simple and convenient use, operation and maintenance, it is widely used in oil and gas recovery, vacuum coating, biomedicine, food processing, single crystal furnace, vacuum molding, vacuum smelting, electronic photovoltaic, semiconductor synthesis and many other industries. It can be used as a single pump or as a unit with other pumps.

——Oil and gas recovery.    ——Biological medicine ——Food Processing —— Single crystal furnace
——Vacuum forming ——Vacuum flame refining ——Electronic photovoltaic. ——Semiconductor synthesis

Product Parameters

 Air cooling   Dry screw vacuum pump

Type
(Air cooled series)
 Basic parameters 
Pumping speed
(m3/h)
Presure limit(Pa)  Power (kW)  revolution (rpm) Inlet caliber
(mm)
outlet caliber (mm) Pump head weight
(kg)
noise dB(A) Overall dimension
(length*width*height)
(mm)
LG-10 10 ≤5 0.75 2730 KF16 KF16 30 ≤ 72 655x260x285
LG-20 20 ≤5 1.1 2840 KF25 KF25 55 ≤72 720x305x370
LG-50 50 ≤10 2.2 2850 KF40 KF40 90 ≤75 920x350x420
LG-70 70 ≤30 3 2850 KF40 KF40 110 ≤75 910x390x460
LG-90 90 ≤30 4 2870 KF50 KF50 125 ≤80 1000x410x495

 

 

Characteristic Curve

 

 Air cooling   Dry screw vacuum pump

 

Detailed Photos

 

Vacuum pumps are used in oiling machines

General Manager Speech

Deeply cultivate the vacuum technology, and research,develop and manufacture the vacuum equipment to provide the best solution in the vacuum field and make the vacuum application easier.

Company Profile

ZheJiang Kaien Vacuum Technology Co., Ltd. is a high-tech enterprise integrating R & D, production and operation of vacuum equipment. The company has strong technical force, excellent equipment and considerate after-sales service. The product manufacturing process is managed in strict accordance with IS09001 quality system. It mainly produces and sells screw vacuum pump, roots pump, claw vacuum pump, runoff vacuum pump, scroll pump, water ring vacuum pump, vacuum unit and other vacuum systems.

New plant plHangZhou

The company’s products have been for a number of food, medicine, refrigeration, drying plants and a number of transformer related equipment manufacturers for vacuum equipment. The products are widely used in vacuum drying and dehydration, kerosene vapor phase drying, vacuum impregnation, vacuum metallurgy, vacuum coating, vacuum evaporation, vacuum concentration, oil and gas recovery, etc.

High precision machining equipment

The company cooperates with many scientific research institutions and universities, such as ZheJiang University, China University of petroleum, ZheJiang Institute of mechanical design, etc.with colleges and universities to research and develop core technologies, and owns dozens of independent intellectual property patents.Our technology is leading, the product quality is stable, the product has a good reputation in China’s domestic market, is sold all over the country, and is exported to Europe, America, Africa, the Middle East and Southeast Asia,We adhering to the basic tenet of quality, reputation and service, the company takes leading-edge technology of vacuum pump as its own responsibility, and wholeheartedly serves customers of vacuum equipment application in various industries with rigorous working attitude and professional working style.

 

 Product quality wins consumer cooperationIn shipment

ISO9001
 

 Welcome to send your needs, we will provide you with the best service,

provide the greatest help!!!

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vacuum pump

What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?

Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:

Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.

Here are some key roles of vacuum pumps in semiconductor manufacturing:

1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.

2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.

3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.

4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.

5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.

6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.

7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.

8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.

Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.

Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.

vacuum pump

Considerations for Selecting a Vacuum Pump for Cleanroom Applications

When it comes to selecting a vacuum pump for cleanroom applications, several considerations should be taken into account. Here’s a detailed explanation:

Cleanrooms are controlled environments used in industries such as semiconductor manufacturing, pharmaceuticals, biotechnology, and microelectronics. These environments require strict adherence to cleanliness and particle control standards to prevent contamination of sensitive processes or products. Selecting the right vacuum pump for cleanroom applications is crucial to maintain the required level of cleanliness and minimize the introduction of contaminants. Here are some key considerations:

1. Cleanliness: The cleanliness of the vacuum pump is of utmost importance in cleanroom applications. The pump should be designed and constructed to minimize the generation and release of particles, oil vapors, or other contaminants into the cleanroom environment. Oil-free or dry vacuum pumps are commonly preferred in cleanroom applications as they eliminate the risk of oil contamination. Additionally, pumps with smooth surfaces and minimal crevices are easier to clean and maintain, reducing the potential for particle buildup.

2. Outgassing: Outgassing refers to the release of gases or vapors from the surfaces of materials, including the vacuum pump itself. In cleanroom applications, it is crucial to select a vacuum pump with low outgassing characteristics to prevent the introduction of contaminants into the environment. Vacuum pumps specifically designed for cleanroom use often undergo special treatments or use materials with low outgassing properties to minimize this effect.

3. Particle Generation: Vacuum pumps can generate particles due to the friction and wear of moving parts, such as rotors or vanes. These particles can become a source of contamination in cleanrooms. When selecting a vacuum pump for cleanroom applications, it is essential to consider the pump’s particle generation level and choose pumps that have been designed and tested to minimize particle emissions. Pumps with features like self-lubricating materials or advanced sealing mechanisms can help reduce particle generation.

4. Filtration and Exhaust Systems: The filtration and exhaust systems associated with the vacuum pump are critical for maintaining cleanroom standards. The vacuum pump should be equipped with efficient filters that can capture and remove any particles or contaminants generated during operation. High-quality filters, such as HEPA (High-Efficiency Particulate Air) filters, can effectively trap even the smallest particles. The exhaust system should be properly designed to ensure that filtered air is released outside the cleanroom or passes through additional filtration before being reintroduced into the environment.

5. Noise and Vibrations: Noise and vibrations generated by vacuum pumps can have an impact on cleanroom operations. Excessive noise can affect the working environment and compromise communication, while vibrations can potentially disrupt sensitive processes or equipment. It is advisable to choose vacuum pumps specifically designed for quiet operation and that incorporate measures to minimize vibrations. Pumps with noise-dampening features and vibration isolation systems can help maintain a quiet and stable cleanroom environment.

6. Compliance with Standards: Cleanroom applications often have specific industry standards or regulations that must be followed. When selecting a vacuum pump, it is important to ensure that it complies with relevant cleanroom standards and requirements. Considerations may include ISO cleanliness standards, cleanroom classification levels, and industry-specific guidelines for particle count, outgassing levels, or allowable noise levels. Manufacturers that provide documentation and certifications related to cleanroom suitability can help demonstrate compliance.

7. Maintenance and Serviceability: Proper maintenance and regular servicing of vacuum pumps are essential for their reliable and efficient operation. When choosing a vacuum pump for cleanroom applications, consider factors such as ease of maintenance, availability of spare parts, and access to service and support from the manufacturer. Pumps with user-friendly maintenance features, clear service instructions, and a responsive customer support network can help minimize downtime and ensure continued cleanroom performance.

In summary, selecting a vacuum pump for cleanroom applications requires careful consideration of factors such as cleanliness, outgassing characteristics, particle generation, filtration and exhaust systems, noise and vibrations, compliance with standards, and maintenance requirements. By choosing vacuum pumps designed specifically for cleanroom use and considering these key factors, cleanroom operators can maintain the required level of cleanliness and minimize the risk of contamination in their critical processes and products.

vacuum pump

Are There Different Types of Vacuum Pumps Available?

Yes, there are various types of vacuum pumps available, each designed to suit specific applications and operating principles. Here’s a detailed explanation:

Vacuum pumps are classified based on their operating principles, mechanisms, and the type of vacuum they can generate. Some common types of vacuum pumps include:

1. Rotary Vane Vacuum Pumps:

– Description: Rotary vane pumps are positive displacement pumps that use rotating vanes to create a vacuum. The vanes slide in and out of slots in the pump rotor, trapping and compressing gas to create suction and generate a vacuum.

– Applications: Rotary vane vacuum pumps are widely used in applications requiring moderate vacuum levels, such as laboratory vacuum systems, packaging, refrigeration, and air conditioning.

2. Diaphragm Vacuum Pumps:

– Description: Diaphragm pumps use a flexible diaphragm that moves up and down to create a vacuum. The diaphragm separates the vacuum chamber from the driving mechanism, preventing contamination and oil-free operation.

– Applications: Diaphragm vacuum pumps are commonly used in laboratories, medical equipment, analysis instruments, and applications where oil-free or chemical-resistant vacuum is required.

3. Scroll Vacuum Pumps:

– Description: Scroll pumps have two spiral-shaped scrolls—one fixed and one orbiting—which create a series of moving crescent-shaped gas pockets. As the scrolls move, gas is continuously trapped and compressed, resulting in a vacuum.

– Applications: Scroll vacuum pumps are suitable for applications requiring a clean and dry vacuum, such as analytical instruments, vacuum drying, and vacuum coating.

4. Piston Vacuum Pumps:

– Description: Piston pumps use reciprocating pistons to create a vacuum by compressing gas and then releasing it through valves. They can achieve high vacuum levels but may require lubrication.

– Applications: Piston vacuum pumps are used in applications requiring high vacuum levels, such as vacuum furnaces, freeze drying, and semiconductor manufacturing.

5. Turbo Molecular Vacuum Pumps:

– Description: Turbo pumps use high-speed rotating blades or impellers to create a molecular flow, continuously pumping gas molecules out of the system. They typically require a backing pump to operate.

– Applications: Turbo molecular pumps are used in high vacuum applications, such as semiconductor fabrication, research laboratories, and mass spectrometry.

6. Diffusion Vacuum Pumps:

– Description: Diffusion pumps rely on the diffusion of gas molecules and their subsequent removal by a high-speed jet of vapor. They operate at high vacuum levels and require a backing pump.

– Applications: Diffusion pumps are commonly used in applications requiring high vacuum levels, such as vacuum metallurgy, space simulation chambers, and particle accelerators.

7. Cryogenic Vacuum Pumps:

– Description: Cryogenic pumps use extremely low temperatures to condense and capture gas molecules, creating a vacuum. They rely on cryogenic fluids, such as liquid nitrogen or helium, for operation.

– Applications: Cryogenic vacuum pumps are used in ultra-high vacuum applications, such as particle physics research, material science, and fusion reactors.

These are just a few examples of the different types of vacuum pumps available. Each type has its advantages, limitations, and suitability for specific applications. The choice of vacuum pump depends on factors like required vacuum level, gas compatibility, reliability, cost, and the specific needs of the application.

China Best Sales LG-10 Explosion-Proof High-Efficiency Screw Vacuum Pump with High Vacuum Degree   vacuum pump for ac	China Best Sales LG-10 Explosion-Proof High-Efficiency Screw Vacuum Pump with High Vacuum Degree   vacuum pump for ac
editor by CX 2024-04-11